» Download Article

Authors
Aphale, Sumeet; Bhikkaji, Bharath; Moheimani, S.O. Reza

Identifier
10.3182/20080706-5-KR-1001.01998

Index Terms
Perception devices and positioning systems; Identification and control methods; Mechatronic systems

Abstract
Piezoelectric stack-actuated parallel-kinematic nanopositioning platforms have their first resonant mode at relatively low frequencies and also suffer from nonlinearities such as hysteresis and creep, resulting in a typically low-grade positioning performance. Closed- loop control algorithms have shown the potential to eliminate these problems and achieve robust, repeatable nanopositioning. In this work, the performance of three commonly used damping controllers is compared based on their closed-loop noise characteristics. The best one is combined with an integrator to produce accurate raster scans of large areas while imparting substantial damping to the system and minimizing inherent nonlinearities. A scanning resolution of approximately 8nm, over a 100μm × 100μm area is achieved.

References

B. Bhikkaji, M. Ratnam, A. J. Fleming, and S. O. Reza
Moheimani. High-performance control of piezoelectric
tube scanners. Accepted for publication in IEEE Transactions
on Control Systems Technology, May 2007.
B. Bhushan, editor. Handbook of Nanotechnology.
Springer, 2004.
R. G. Brown and P. Y. C. Hwang. Introduction to Random
Signals and Applied Kalman Filtering. John Wiley and
Sons, New York, USA, 2002.
D. Croft, G. Shedd, and S. Devasia. Creep, hysteresis,
and vibration compensation for. piezoactuators: Atomic
force microscopy application. Journal of Dynamic Systems,
Measurement, and Control, 123(1):35�43, March
2001.
D Croft, S Stilson, and S Devasia. Optimal tracking of
piezo-based nanopositioners. Nanotechnology, 10(2):201
� 208, June 1999.
T. A. Desai,W. H. Chu, J. K. Tu, G. M. Beattie, A. Hayek,
and M. Ferrari. Microfabricated immunoisolating bio-
capsules. Biotechnology and Bioengineering, 57:118�120,
1998.
O. M. El-Rifai and K. Youcef-Toumi. Creep in piezoelec-
tric scanners of atomic force microscopes. Proceedings
of the American Control Conference, Anchorage, AK,
USA, May, pages 3777 � 3782, 2002.
J. L. Fanson and T. K. Caughey. Positive position feedback
control for large space structures. AIAA Journal, 28(4):
717 � 724, 1990.
A. J. Fleming and S. O. R. Moheimani. Sensorless vibra-
tion suppression and scan compensation for piezoelectric
tube nanopositioners. IEEE Transactions on Control
Systems Technology, 14(1):33 � 44, January 2006.
I. Fujimasa. Micromachines: A New Era in Mechanical
Engineering. Oxford University Press, Oxford, UK.,
1996.
G. C. Goodwin, S. F. Graebe, and M. E. Salgado. Control
System Design. Printice Hall International, Inc, 2001.
H. Jung, J. Y. Shim, and D. Gweon. Tracking control
of piezoelectric actuators. Nanotechnology, 12:14 � 20,
2001.
B. Kang and James K. Mills. Vibration control of a planar
parallel manipulator using piezoelectric actuators. J.
Intell. Robotics Syst., 42(1):51�70, 2005. ISSN 0921-
0296. doi: http://dx.doi.org/10.1007/s10846-004-3028-
1.
S. O. R. Moheimani, B. J. G. Vautier, and B. Bhikkaji.
Experimental implementation of extended multivariable
PPF control on an active structure. IEEE Transactions
on Control Systems Technology, 14(3):443�455, May
2006.
D. Niederberger, A. J. Fleming, S. O. R. Moheimani, and
M. Morari. Adaptive multimode resonant piezoelectric
shunt damping. Smart Materials and Structures, 18(2):
291�315, October 2004.
H. R. Pota, S. O. R. Moheimani, and M. Smith. Resonant
controllers for smart structures. Smart Materials and
Structures, 11(1):1 � 8, 2002.
A. Sebastian and S.M. Salapaka. Design methodologies for
robust nano-positioning. IEEE Transactions on Control
Systems Technology, 13(6):868 � 876, November 2005.